| Name | WorkStatus | Return To Service |
|---|
| AFM-DI-Dimension5000 | UP | |
| Aligner-KarlSuss-MA56 | UP | |
| Aligner-KarlSuss-MJB3 | UP | |
| Asher-Diener-PICO-UHP-RF | UP | |
| Backside-Aligner-OAI806MBA | UP | |
| Blue-M-Ovens-Small(2) | UP | |
| Confocal Microscope-LSM-Zeiss | UP | |
| DI-water-system-bay1 | UP | |
| DI-Water-System-Bay4 | UP | |
| DI-Water-System-TFAB | UP | |
| DiffusionFurnace-MiniBrute | UP | |
| DRIE-Etcher-TRION | UP | |
| E-beam-Evaporator-CHA | DOWN | 2008-05-16 |
| ebeam-evaporator-AJA | UP | |
| ElectricalTest-Agilent-4155C-4 | UP | |
| ElectricalTest-HP-4061A | UP | |
| ElectricalTest-TFAB | UP | |
| Ellipsometer-Gaertner-L116A | UP | |
| FIB/E-Beam-Writer-Zeiss1540 | UP | |
| Four-Point-Probe-Jandel | UP | |
| Four-Point-Probe-Veeco-FPP5000 | UP | |
| Furnace-GeneralPurpose-MiniBru | UP | |
| Hotplates-Signatone | UP | |
| Hotplates-Thermoline(4) | UP | |
| InertATM-Oven-BlueM-IGP6680 | UP | |
| M.B.E | UP | |
| Nanoimprinter-Nanonex-NXB200 | UP | |
| NomarskiMicroscope-Nikon | UP | |
| Optical-Microscope-Bay1 | UP | |
| Optical-Microscope-TFAB-Yellow | UP | |
| Optical-Micrscope-TFAB | UP | |
| Oxidation-Furncae-Lindberg | UP | |
| OxidationFurnace-MiniBrute | UP | |
| PECVD/LPCVD-TRION-ORION-II | UP | |
| PlasmaEtcher-PlasmaTherm500 | UP | |
| ProbeStation-M&M-6000 | UP | |
| ProbeStation-M&M-8060 | UP | |
| ProbeStation-VariableTemp | UP | |
| Pulsed-Laser-Deposition | UP | |
| Reflectometer-OceanOptics | UP | |
| RIE-Etcher-TRION-MINILOCK-II | DOWN | 2008-05-22 |
| RIE-Technics-MicroRIE800 | DOWN | 2008-05-29 |
| RTA-AG-Associates-Heatpulse210 | UP | |
| RTA-JetFirst-150 | UP | |
| Saw-Disco DAD | UP | |
| Saw-Microautomation-1100 | UP | |
| SEM/EDS-Zeiss-Supra55VP-EDAX40 | UP | |
| Spinner-Headway-Bay1 | UP | |
| Spinner-Headway-TFAB | UP | |
| Sputter-AJA | UP | |
| Sputter-Homebuilt | UP | |
| SputterSystem-PQ-129 | UP | |
| SurfaceProfiler-AlphaStepIQ | UP | |
| Thermal Evaporator-AJA | UP | |
| Thermal-Evaporator-NRC3117 | UP | |
| UHV-STM-RHK-UHV3000 | UP | |
| Wafer Dryer | UP | |
| WeighingScale-TeachingFab | UP | |
| Wire-Bonder-Kulicke-4524 | UP | |
| WireBonder-KS | UP | |
| WireBonder-WestBond-7476E | UP | |