| Name | WorkStatus | Return To Service | Tool Operator |
|---|
| AFM-DI-Dimension5000 | UP | | Fatima Amir |
| Aligner-KarlSuss-MA56 | UP | | Dennis Bueno |
| Aligner-KarlSuss-MJB3 | UP | | Dennis Bueno |
| Backside-Aligner-OAI806MBA | UP | | Dennis Bueno |
| Confocal | UP | | Fatima Amir |
| Deiner-Asher-Pico | UP | | Dennis Bueno |
| DI-Water-System-Bay4 | DOWN | 2009-12-20 | Eduardo Maldonado |
| DI-Water-System-TFAB | UP | | Dennis Bueno |
| Dicer-Disco-Automation | UP | | Paul Logan |
| Dicer-MicroAutomation | UP | | Paul Logan |
| DiffusionFurnace-MiniBrute | UP | | Fatima Amir |
| DRIE-Etcher-TRION | UP | | Eduardo Maldonado |
| E-beam-Evaporator-CHA | UP | | Dennis Bueno |
| ebeam-evaporator-AJA | DOWN | 2009-11-18 | Eduardo Maldonado |
| ElectricalTest-Agilent-4155C-4 | UP | | Eduardo Maldonado |
| ElectricalTest-HP-4061A | UP | | Fatima Amir |
| ElectricalTest-TFAB | UP | | Eduardo Maldonado |
| Ellipsometer-Gaertner-L116A | DOWN | 2010-01-20 | Fatima Amir |
| FIB/E-Beam-Writer-Zeiss1540 | UP | | Fatima Amir |
| Four-Point-Probe-Jandel | UP | | Eduardo Maldonado |
| Four-Point-Probe-Veeco-FPP5000 | UP | | Eduardo Maldonado |
| Hotplates-Signatone | UP | | Dennis Bueno |
| InertATM-Oven-BlueM-IGP6680 | UP | | Dennis Bueno |
| KarlSuss-MA56 | UP | | Dennis Bueno |
| LPCVD-Nitride-Tystar | UP | | Eduardo Maldonado |
| Nanoimprinter-Nanonex-NXB200 | UP | | Dennis Bueno |
| Nickel-Electroplating | UP | | Dennis Bueno |
| NomarskiMicroscope-Nikon | UP | | Fatima Amir |
| Optical-Microscope-Bay1 | UP | | Fatima Amir |
| Optical-Microscope-TFAB-Yellow | UP | | Fatima Amir |
| Optical-Micrscope-TFAB | UP | | Fatima Amir |
| Oxidation-Furnace-Tystar | UP | | Eduardo Maldonado |
| Oxidation-Furncae-Lindberg | UP | | Eduardo Maldonado |
| PECVD/LPCVD-TRION-ORION-II | UP | | Dennis Bueno |
| PlasmaEtcher-PlasmaTherm500 | DOWN | 2009-12-20 | Dennis Bueno |
| ProbeStation-M&M-6000 | UP | | Eduardo Maldonado |
| ProbeStation-M&M-8060 | UP | | Fatima Amir |
| ProbeStation-VariableTemp | UP | | Fatima Amir |
| Profilometer | UP | | Fatima Amir |
| Pulsed-Laser-Deposition | UP | | Dennis Bueno |
| Reflectometer-OceanOptics | UP | | Fatima Amir |
| RIE-Etcher-TRION-MINILOCK-II | UP | | Eduardo Maldonado |
| RIE-Technics-MicroRIE800 | UP | | Dennis Bueno |
| RTA-JetFirst-150 | UP | | Dennis Bueno |
| SEM/EDS-Zeiss-Supra55VP-EDAX40 | UP | | Fatima Amir |
| Spinner-Headway-Bay1 | UP | | Dennis Bueno |
| Spinner-Headway-TFAB | UP | | Dennis Bueno |
| Sputter-AJA | UP | | Dennis Bueno |
| Sputter-Homebuilt | UP | | Dennis Bueno |
| SputterSystem-PQ-129 | UP | | Dennis Bueno |
| SurfaceProfiler-AlphaStepIQ | UP | | Fatima Amir |
| Thermal-Evaporator-AJA | UP | | Dennis Bueno |
| Thermal-Evaporator-NRC3117 | UP | | Dennis Bueno |
| UHV-STM-RHK-UHV3000 | UP | | Nader Hozhabri |
| WeighingScale-TeachingFab | UP | | Eduardo Maldonado |
| Wire-Bonder-Kulicke-4524 | UP | | Eduardo Maldonado |
| WireBonder-KS | UP | | Fatima Amir |
| WireBonder-WestBond-7476E | UP | | Fatima Amir |