NanoFab Management System

NanoFab Management System

11/23/09 at 10.42:pm


Equipment Status


Date:  2009-10-22
Staff:  Nader Hozhabri
Equipment:  PECVD/LPCVD-TRION-ORION-II


Message: A large gas leak was discovered on the gas manifold for NH3 gas. Part is taken to vendor for repair.